Portal de Transparencia

Actividad investigadora:

• Artículos en revistas
  • [2019] AlN-based solidly mounted resonators at 400 degrees C: in-situ performance monitoring
  • [2019] Combined assessment of Al1-xScxN thin films by RBS, XRD, FTIR and BAW frequency response measurements
  • [2019] Direct growth of few-layer graphene on AlN-based resonators for high-sensitivity gravimetric biosensors
  • [2019] Impact of FBAR design on its sensitivity as in-liquid gravimetric sensor
  • [2019] MICROACOUSTIC SENSORS WITH INTEGRATED CARBON NANOTUBES FOR HIGH VOC SENSITIVITY
  • [2018] A1N-based solidly mounted resonators on glass substrates for high temperature applications
  • [2018] Effects of Post-Deposition Vacuum Annealing on the Piezoelectric Properties of AlScN Thin Films Sputtered on 200 Mm Production Wafers
  • [2018] Hafnium nitride as high acoustic impedance material for fully insulating acoustic reflectors
  • [2018] Resonant and Antiresonant Frequencies Behavior with Temperature Changes in Gravimetric Sensors
  • [2017] Frequency response of AlN-based solidly mounted resonators under mechanical stress
  • [2017] Integration of multilayered graphene on AlN based resonators as a functionalization platform for biosensors
  • [2017] Substrate texturing for homogeneous deposition of tilted c-axis AlN films for shear mode operation
  • [2016] Bacteria detection with high-frequency gravimetric biosensors based on AlN thin film resonators
  • [2016] Direct comparison of the sensitivity of QCMs and AlN-based TFRs biosensors
  • [2016] Influence of induced stress on AlN-solidly mounted resonators
  • [2016] Room temperature sputtering of inclined c-axis ZnO for shear mode solidly mounted resonators
  • [2016] Transparent thin film bulk acoustic wave resonators
  • [2016] Tungsten Oxide Layers of High Acoustic Impedance for Fully Insulating Acoustic Reflectors
  • [2015] Tungsten oxide layers of high acoustic impedance for fully insulating acoustic reflectors
  • [2015] Discrete microfluidics based on aluminum nitride surface acoustic wave devices
  • [2015] Growth of carbon nanotube forests on metallic thin films
  • [2015] Sputtered Al((1-x))Sc(x)A thin films with high areal uniformity for mass production
  • [2015] Tungsten oxide layers of high acoustic impedance for fully insulating acoustic reflectors
  • [2014] AlN Solidly Mounted Resonators for High Temperature Applications
  • [2014] Carbon Nanotube Forests as Top Electrodes for A1N-Based Electroacoustic Resonators
  • [2014] Discrete microfluidics based on aluminum nitride surface acoustic wave devices
  • [2014] On the effectiveness of lateral excitation of shear modes in AlN layered resonators
  • [2014] On the effectiveness of lateral excitation of shear modes in AlN layered resonators
  • [2014] Resistive switching in manganite/graphene hybrid planar nanostructures
  • [2014] The influence of Acoustic Reflectors on the Temperature Coefficient of Frequency of Solidly Mounted Resonators
  • [2014] ZnO/AlN Stacked BAW Resonators with Double Resonance
  • [2013] Direct comparison of the gravimetric responsivities of ZnO-based FBARs and SMRs
  • [2013] Direct comparison of the gravimetric responsivities of ZnO-based FBARs and SMRs
  • [2012] Experimental comparison of FBARs and SMRs responsitivities to mass loadings
  • [2012] High-Acoustic-Impedance Tantalum Oxide Layers for Insulating Acoustic Reflectors
  • [2012] Influence of Crystal Quality on the Excitation and Propagation of Surface and Bulk Acoustic Waves in Polycrystalline AlN Films
  • [2012] Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators
  • [2012] On the Lateral Excitation Of Shear Modes in AlN Layered Resonators
  • [2012] On the Lateral Excitation Of Shear Modes in AlN Layered Resonators
  • [2012] Piezoelectric and electroacoustic properties of Ti-doped AlN thin films as a function of Ti content
  • [2012] Ta2O5/SiO2 insulating acoustic mirrors for AlN-based X-band BAW resonators
  • [2012] Thermally assisted tunneling transport in La0.7Ca0.3MnO3/SrTiO3:Nb Schottky-like heterojunctions
  • [2011] AlN-based BAW resonators with CNT electrodes for gravimetric biosensing
  • [2011] Anisotropic magnetotransport in SrTiO3 surface electron gases generated by Ar+ irradiation
  • [2010] DCS Tx Filters Using AlN Resonators With Iridium Electrodes
  • [2010] Porous silicon oxide sacrificial layers deposited by pulsed-direct current magnetron sputtering for microelectromechanical systems
  • [2010] Sputtered SiO2 as Low Acoustic Impedance Material for Bragg Mirror Fabrication in BAW Resonators
  • [2009] AlN films sputtered on iridium electrodes for bulk acoustic wave resonators
  • [2008] Aluminum nitride for heatspreading in RF IC’s
  • [2008] Electrical detection of the mechanical resonances in AlN-actuated microbridges for mass sensing applications
  • [2007] Aluminium nitride bulk acoustic wave devices with iridium bottom electrodes
  • [2007] Assessment of aluminium nitride films sputtered on iridium electrodes
  • [2007] Circuital model for the analysis of the characteristics of SAW devices of AlN film on non-insulating substrates
  • [2007] Combined assessment of piezoelectric AlN films using X-ray diffraction, infrared absorption and atomic force microscopy
  • [2007] Frequency characterization of AlN piezoelectric resonators
  • [2007] MEMS actuated piezoelectrically with AlN films
  • [2007] Picosecond ultrasonics as a helpful technique for introducing a new electrode material en BAW technology: the iridium case
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• Conferencias invitadas en congresos
  • [2019] From Smart Materials to Sensors Workshop, Nancy April 4 2019
  • [2019] UPM - NPU Workshop on Advanced Materials and Devices
• Otras Publicaciones
  • [2017] Integration and Bio-Functionalization of Vertically Aligned Carbon Nanotube Forests on High Frequency AlN Gravimetric Sensors
  • [2017] Integration of multilayered graphene on AlN based resonators as a functionalization platform for biosensors
• Patentes
  • [2010] Dispositivo de filtrado de ondas acústicas de volumen
  • [2009] Dispositivo de filtrado de ondas acústicas de volumen
• Ponencia en Congresos
  • [2019] AlN-based solidly mounted resonators at 400 degrees C: in-situ performance monitoring
  • [2019] Combined assessment of Al1-xScxN thin films by RBS, XRD, FTIR and BAW frequency response measurements
  • [2019] MICROACOUSTIC SENSORS WITH INTEGRATED CARBON NANOTUBES FOR HIGH VOC SENSITIVITY
  • [2018] Finding the upper mass limit until which gravimetric sensors preserve their original TCF and sensitivity
  • [2018] Influence of the acoustic energy distribution on the in-liquid sensitivity of thin film electroacoustic resonators
  • [2018] Reactive sputtering of AlScN thin Ulms with variable Sc content on 200 mm wafers
  • [2017] AlN-Solidly mounted resonators sustaining up to 1000 degrees C with TCF compensation
  • [2017] Direct integration of CNT forests on solidly mounted resonators and their influence on device performance
  • [2017] Integration and Bio-functionalization of vertically aligned carbon nanotube forests on high frequency AlN gravimetric sensors
  • [2017] Integration of multilayered graphene on AlN based resonators as a functionalization platform for biosensors
  • [2017] Substrate texturing for homogeneous deposition of tilted c-axis AlN films for shear mode operation
  • [2016] AlN based-Solidly mounted resonators at high temperatures: In-situ characterization
  • [2016] Direct comparison of the sensitivity of QCMs and AlN-based TFRs biosensors
  • [2016] Direct comparison of the sensitivity of QCMs and AlN-based TFRs biosensors
  • [2016] Direct comparison of the sensitivity of QCMs and AlN-based TFRs biosensors
  • [2016] Direct comparison of the sensitivity of QCMs and AlN-based TFRs biosensors
  • [2016] Influence of induced stress on AlN-solidly mounted resonators
  • [2016] Solidly mounted resonators with integrated carbon nanotube forests for chemical sensing
  • [2016] Sputtered AlN thin films with tilted grains for shear mode resonators applied to biosensors
  • [2016] Transparent thin film bulk acoustic wave resonators
  • [2016] Transparent thin film bulk acoustic wave resonators
  • [2015] Sputtered Al(1-x)ScxN thin films with high areal uniformity for mass production
  • [2015] Sputtered AlScN thin films with high areal uniformity for mass production
  • [2015] Tungsten oxide as high acoustic impedance material for fully insulating acoustic reflectors
  • [2014] AlN shear mode solidly mounted resonator with temperature compensation for in-liquid sensing
  • [2014] Assessment of the Acoustic Shear Velocity in SiO2 and Mo layers for Acoustic Reflectors
  • [2014] Influence of the electrical extensions in AlN-BAW resonators for in-liquid biosensors
  • [2014] Seed Layer Controlled Deposition of ZnO Films with a Tilted c-axis for Shear Mode Resonators
  • [2013] Acoustic Properties of Carbon Nanotube Electrodes in BAW Resonators
  • [2013] IR-Reflectance Assessment of the Tilt Angle of AlN-Wurtzite Films for Shear Mode Resonators
  • [2013] Induced Surface Roughness to Promote the Growth of Tilted-AlN Films for Shear Mode Resonators
  • [2013] Piezoelectric and Electroacoustic Properties of V-Doped and Ta-Doped AlN Thin Films
  • [2012] Experimental comparison of FBARs and SMRs responsitivities to mass loadings
  • [2012] On the Lateral Excitation Of Shear Modes in AlN Layered Resonators
  • [2012] On the origin of RTS noise in nanoFETs
  • [2012] Piezoelectric and electroacoustic properties of Ti-doped AlN thin films as a function of Ti content
  • [2012] Piezoelectric and electroacoustic properties of Ti-doped AlN thin films as a function of Ti content
  • [2011] Characterization of Amorphous Tantalum Oxide for Insulating Acoustic Mirrors
  • [2011] Growth of AlN oriented films on insulating substrates
  • [2011] Multiple Frequency Solidly Mounted BAW Filters
  • [2011] Solidly Mounted Resonators with Carbon Nanotube Electrodes for Biosensing Applications
  • [2011] Ta2O5/SiO2 insulating acoustic mirrors for AlN-based X-band BAW resonators
  • [2010] Assessment of solidly mounted resonators with wide-band asymmetric acoustic reflectors
  • [2010] Optimization of thin AlN sputtered films for X-band BAW resonators
  • [2009] DCS Tx filters using AlN resonators with Iridium electrodes
  • [2009] Influence of AlN quality on the Transverse and Longitudinal Coupling Coefficients of Acoustic devices
  • [2009] SiOx as low acoustic impedance material for Bragg mirror fabrication in BAW resonators
  • [2009] Silicon oxide sacrificial layers deposited by pulsed-DC magnetron sputtering for MEMS applications
  • [2009] Sputtered polycrystalline AlN as a platform for biofunctionalized devices
  • [2009] Wide Bandwidth Bragg Mirrors for Multi-band Filter Chips
  • [2008] Advanced determination of piezoelectric properties of AlN thin films on silicon substrates
  • [2008] Aluminium Nitride Solidly Mounted BAW Resonators with Iridium Electrodes
  • [2008] BAW Resonators Based on AlN with Ir Electrodes for Digital Wireless Transmissions
  • [2008] Piezoelectric Microresonators Based on Aluminim Nitride for Mass Sensing Applications
  • [2007] Aluminium nitride bulk acoustic wave devices with iridium bottom electrodes
  • [2007] Assessment of aluminium nitride films sputtered on iridium electrodes
  • [2007] Frequency Characterization of AlN Piezoelectric Resonators
  • [2007] MEMS actuated piezoelectrically with AlN films
  • [2007] Picosecond ultrasonics as a helpful technique for introducing a new electrode material en BAW technology: the iridium case
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• Proyectos de I+D+i
  • [2019] CHARACTERIZATION OF AISCN SPUTTERED THIN FILMS
  • [2017] CHARACTERIZATION OF SPUTTERED THIN FILMS OF AISCN
  • [2016] MATERIALES MULTIFUNCIONALES EN PELICULA DELGADA PARA DISPOSITIVOS PIEZOELECTRICOS AVANZADOS( RESONADORES ACUSTICOS Y SENSORES MEMS)
  • [2016] RAPID APTAMER BASED DIAGNOSTICS FOR BACTERIAL MENINGITIS RAPTADIAG
  • [2015] BIOPICA: Materiales avanzados para biosensores basados en resonadores piezoeléctricos combinados con nanotubos de carbono y grafeno
  • [2015] PELICULAS DELGADAS DE MATERIALES PIEZOELECTRICOS PARA APLICACIONES EN RESONADORES DE ONDAS ACUSTICAS DE VOLUMEN: NITRURO DE ALUMINIO Y NUEVOS OXIDOS COMPLEJOS FE
  • [2014] MATERIALES AVANZADOS PARA BIOSENSORES BASADOS EN RESONADORES PIEZOELÉCTRICOS COMBINADOS CON NANOTUBOS DE CARBONO Y GRAFENO
  • [2014] PLATAFORMA MULTIPLEXADA PARA EL DIAGNÓSTICO DE ENFERMEDADES CARDIOVASCULARES
  • [2013] INTEGRATING DEVICES AND MATERIALS : A CHALLENGE FOR NEW INSTRUMENTATION IN ICT
  • [2013] Materiales multifuncionales en película delgada para dispositivos piezoeléctricos avanzados (resonadores acústicos y sensores MEMS) - MAREA
  • [2013] Materiales multifuncionales en película delgada para dispositivos piezoeléctricos avanzados (resonadores acústicos y sensores MEMS) - MAREA
  • [2013] RAPID APTAMER BASED DIAGNOSTICS FOR BACTERIAL MENINGITIS RAPTADIAG
  • [2012] Materiales funcionales en película delgada para dispositivos piezoeléctricos avanzados (resonadores acústicos y sensores MEMS)
  • [2012] Materiales funcionales en película delgada para dispositivos piezoeléctricos avanzados (resonadores acústicos y sensores MEMS)
  • [2012] RaptaDiag: Rapid Aptamer based diagnostics for bacterial meningitis
  • [2011] INTEGRACIÓN DE RESONADORES BAW BASADOS EN ALN CON FRECUENCIAS SUSTANCIALMENTE DISTINTAS SOBRE EL MISMO SUSTRATO
  • [2011] MATERIALES MULTIFUNCIONALES EN PELICULA DELGADA PARA DISPOSITIVOS PIEZOELECTRICOS AVANZADOS( RESONADORES ACUSTICOS Y SENSORES MEMS)
  • [2011] MOBILIS - 027003
  • [2010] MATERIALES MULTIFUNCIONALES EN PELICULA DELGADA PARA DISPOSITIVOS PIEZOELECTRICOS AVANZADOS( RESONADORES ACUSTICOS Y SENSORES MEMS)
  • [2010] MOBILIS - 027003
  • [2010] PELICULAS DELGADAS DE MATERIALES PIEZOELECTRICOS PARA APLICACIONES EN RESONADORES DE ONDAS ACUSTICAS DE VOLUMEN: NITRURO DE ALUMINIO Y NUEVOS OXIDOS COMPLEJOS FE
  • [2009] MATERIALES ELECTRÓNICOS EN PELÍCULA DELEGADA
  • [2009] MOBILIS - 027003
  • [2009] PELICULAS DELGADAS DE MATERIALES PIEZOELECTRICOS PARA APLICACIONES EN RESONADORES DE ONDAS ACUSTICAS DE VOLUMEN: NITRURO DE ALUMINIO Y NUEVOS OXIDOS COMPLEJOS FE
  • [2008] Acción complemantaria para Mixed SiP and SoC integration of power BAW filters for digital wireless transmissions
  • [2008] MATERIALES ELECTRÓNICOS EN PELÍCULA DELEGADA
  • [2008] MOBILIS: Mixed SiP and SoC integration of power BAW filters for digital wireless transmissions
  • [2008] Películas delgadas de materiales piezoeléctricos para aplicaciones en resonadores de ondas acústicas de volumen: nitruro de aluminio y nuevos óxidos complejos ferroeléctricos¿
  • [2008] Óxidos complejos piezoeléctricos para aplicaciones en microsistemas y filtros de alta frecuencia
  • [2007] Acción complementaria del proyecto Mixed SiP and SoC Integration of BAW Filters for Digital Wireless Transmission (MOBILIS)
  • [2007] Detección eléctrica de resonancias mecánicas en microrresonadores basados en actuación piezoeléctrica con nitruro de aluminio
  • [2007] Mixed SiP and SoC Integration of BAW Filters for Digital Wireless Transmission
  • [2007] Películas delgadas de materiales piezoeléctricos para aplicaciones en resonadores de ondas acústicas de volumen: nitruro de aluminio y nuevos óxidos complejos ferroeléctricos
  • [2007] Tecnologías para la fabricación de microsistemas electromecánicos (MEMS) basados en el accionamiento piezoeléctrico con nitruro de aluminio (AlN): Optimización de los materiales y de su procesado
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• Responsabilidades
  • [2019] Participación en tribunal de tesis internacional
  • [2019] Revisión de artículos científicos
  • [2018] Participación invitada en el NPU-UPM Workshop on Advanced Materials and Devices
  • [2018] Revisión de artículos de revistas internacionales
  • [2017] Revisión de artículos en revistas internacionales
  • [2016] Evaluadora ANEP
  • [2016] Revisora de revistas internacionales
  • [2015] COST IC1208 Science Representative
  • [2015] Evaluadora ANEP
  • [2015] Revisora en revistas internacionales
  • [2014] Revisora de artículos en revistas científicas
  • [2013] Revisora de artículos en revistas científicas internacionales
  • [2012] Revisión de artículos en revistas científicas internacionales
  • [2011] Revisora de artículos en revistas científicas internacionales
  • [2010] Revisora de revistas internacionales
  • [2009] Evaluación de artículos en revistas internacionales
  • [2008] Revisión de artículos científicos.
  • [2007] Evaluación de artículos en revistas internacionales
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• Tesis Doctorales
  • [2016] HIGH SENSITIVITY BIOSENSORS BASED ON SHEAR MODE AlN RESONATORS FOR IN LIQUID OPERATION